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Recent salaries shared by Systems Performance Engineer at ASML
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ASML employees working as Systems Performance Engineer in US have attributed a compensation and benefits rating of 2 out of 5 stars, based on 1 ratings. This is 46% lower than the average of Systems Performance Engineer professionals at ASML worldwide.
The salary trajectory of a Systems Performance Engineer ranges between locations and employers. The salary starts at $0 per year (estimate) and goes up to $0 per year (estimate) for the highest level of seniority.
The estimated average salary for a Systems Performance Engineer at ASML is $166,344 per year or $80 per hour, but some professionals have reported earning up to roughly $239,624 per year (90th percentile). The typical pay range is between $139,018 (25th percentile) and $202,036 (75th percentile) annually. This is based on 0 salaries submitted by ASML Systems Performance Engineer professionals on Glassdoor, as of Jun 2026.